Rebirth of refractory metals in the furnace by secondary resource utilization
Tungsten, tantalum, niobium, rhenium and molybdenum...The refractory metals have very important applications in atomic energy, aerospace, electronic information, medical diagnosis and treatment and other high-tech fields related to national security, national economy and people's livelihood. However, in the past 10 years, most of the tungsten resources consumed by the world tungsten industry come from China, resulting in a sharp decline in the reserves of this kind of high-quality strategic resources in China.
26, the reporter learns from Beijing institute of technology, ten years grinding sword, by the Beijing institute of technology, China shipbuilding industry corporation DiQiYiBa research institute, China institute of atomic energy of kunming university of science and technology and the project team, based on the secondary resources use high-end refractory metal products research and development and application of a major breakthrough.
"Through the application of basic research and industrialization, the project team has made a breakthrough in the whole chain industrialization technology of products from recycling waste to electronic-grade WF6 gas and ultra-high purity tungsten parts, making breakthroughs in the production and purification of high-efficiency fluorination of WF6, as well as the production of high-purity tungsten target material, tungsten heater and special-shaped tungsten crucible under atmospheric pressure chemical vapor deposition.The key technologies include plasma chemical preparation of high purity ultrafine tungsten powder based on exhaust gas utilization, F2/NF3 and H2 electrolytic preparation of by-product HF and its application in the preparation and reduction of WF6."Tan Chengwen, a professor at the Beijing Institute of Technology who heads the project team, said.
After about 10 years of efforts, the project team has developed a series of high-end products, such as high-purity WF6, ultra-high-purity tungsten target material, high-purity tungsten components for ion implantation machine, high-performance tungsten heater, high-purity specialshaped tungsten crucible and so on.
Tan Chengwen said that the purity of high-purity WF6 reached 99.999%, which met the high purity requirements of the semiconductor industry for special gases. It has been widely used in well-known semiconductor companies at home and abroad, such as Intel, Toshiba, Taiwan Semiconductor Manufacturing, SMIC, etc., occupying 80% of the domestic market and nearly 25% of the international market.In only 3 years, the annual output value of a single product exceeded 100 million yuan, and the profit margin was greater than 20%.With the continuous improvement of technology, the consumption of products in relevant enterprises has been greatly increased to break the foreign monopoly.Ultra-high purity tungsten target material, high purity tungsten components used in ion implantation machine, tungsten heating body, special tungsten crucible purity up to 99.999999%.
