A drying method for target material
Today, LCD display technology has been widely used in various fields, LCD flat target material (aluminum, copper, molybdenum target material target material or molybdenum niobium target material) on any of the target material need drying of welding seam, BP after the cleaning steps, BP in the hole and BP sink hole cleaning fluid, now widely used high pressure air and hot uneven drying fan blow dry, High risk of handheld operation. The backward drying method of target and the limitation of drying turnover will greatly reduce the qualified rate of target.
Therefore, how to provide a kind of target material (aluminum, copper, molybdenum target material target material or molybdenum niobium target material) on any of the target material drying method, improve target material (aluminum, copper, molybdenum target material target material or molybdenum niobium target material) on any of the target material drying uniformity and drying velocity, reduce the target material (aluminum, copper, molybdenum target material target material or molybdenum niobium target material) on any of the target material of abnormal rate, And suitable for different materials of target drying, has become an urgent problem in the field of technical personnel to solve.
There is a target drying method, which improves the drying uniformity and the drying turnover of the target (aluminum target, copper target, molybdenum target or any one of molybdenum niobium target), reduces the abnormal rate of the target, and is suitable for the target drying of different materials.
(1) Make the target (aluminum target, copper target, Mo target or any one of molybdenum niobium target) in the rotation state around the target center;
(2) Dry gas with humidity ≤ 30% is used to dry the target material.
Wherein, the dry gas in step (2) is in a circulating state, and dehumidification treatment is carried out before each cycle.
The humidity of the dry gas described in step (2) is less than or equal to 30%, for example 5%, 10%, 15%, 20%, 25% or 30%, but is not limited to the values listed, and other values not listed in the range are also applicable.
Controlling the humidity of the drying gas below 30% helps to improve the drying adequacy of the target (aluminum target, copper target, molybdenum target or any one of molybdenum niobium target). The target can be completely dried at a lower temperature and in a shorter time, saving energy consumption.
Keep the target material in the drying process target material (aluminum, copper, molybdenum target or target material molybdenum niobium) on any of the target material in a state of rotating cycle drying gas at the same time, to ensure the ambient humidity and temperature uniformity of target material, improve the drying on the drying velocity, and uniformity of target material to reduce the target material for various heating inhomogeneity caused by abnormal rate, Suitable for drying target material of different materials.
Dry gas including air, nitrogen, helium and argon in any one or a combination of at least two, but not typical restrictive combination including the combination of air and nitrogen, the combination of nitrogen and helium gas, the combination of helium and argon gas, air, nitrogen and the combination of helium, the combination of nitrogen, helium and argon gas, or a combination of air, nitrogen, helium and argon.
