Welding method of rotating molybdenum target
Molybdenum is a kind of silver-white metal, tough texture, melting point is 2617℃, boiling point is 4612℃, at normal temperature and pressure with good corrosion resistance, stability, good conductivity, thermal expansion and low specific impedance, widely used in aviation industry, electronics industry and solar photovoltaic industry.
Magnetron sputtering is a widely used sputtering target for large-scale low-E glass coating, solar cell coating, flat screen touch screen coating, optical communication and magnetic storage coating and decorative coating technology, sputtering target usually has two types of flat target and rotating target.
In recent years, with the market's high efficiency requirements for target utilization, the use of rotating molybdenum target is increasing, therefore, the welding method of rotating molybdenum target is one of the hot spots that researchers continue to develop in recent years. The outer wall of the back tube is machined and fixed horizontally on the rotating equipment after cleaning and drying, solder is added to the open slot, molybdenum target tube is selected, the inner wall of the molybdenum target tube is metallized, the treated molybdenum target tube is placed on the back tube, the rotating equipment is started, the inner wall of the back tube and the outer wall of the target are heated at the same time, after binding is completed, the heating power is turned off, and the rotation is maintained. Until the molybdenum tube cools to room temperature.
