Tubular molybdenum target
Due to its good electrical properties and thermal stability, molybdenum has been widely used in the manufacturing of flat display and thin film solar cells, and the rapid development of flat display and photovoltaic industry has greatly driven the market demand for molybdenum sputtering targets. Compared with the planar target, the design using the rotating target structure shows its substantial advantages. The change of the geometric structure and design from the planar target to the rotating target increases the utilization rate of the target, which can be increased from 30% ~ 50% of the planar target to more than 80% of the rotating target. In addition, if the life of the target is measured in KW·h, the life of the rotating target is 5 times longer than that of the flat target.
In recent years, with the increasing of LCD screen size, the corresponding sputtering plate molybdenum target also increases its area. Using a rotating molybdenum tube as the target material, the width of the screen is determined by the length of the molybdenum tube, and the length of the screen is unrestricted. Although the utilization rate of tube target is higher than that of plane target, because tubular target is difficult to manufacture and has low yield, the market application of molybdenum tube target is very low. With the development of molybdenum sputtering target size to large size, high target utilization rate and other directions, the market application of molybdenum tube target will be rapidly developed.
In order to improve the uniformity of the sputtering layer, the sputtering target material is required to have a high density (above 99.7%). However, the most commonly used process of forming molybdenum products (powder metallurgy) can not reach the density of target material, so it is necessary to add a hot processing process to improve the density of its products. For large tube targets, forging is often used to improve the density. The processing process of this method is to first prepare large diameter bar billet, and then forge to the required outer diameter size, and then through cutting holes and machining to get the required size of tube targets. Another method to prepare molybdenum tube target is to sintered molybdenum tube target through simple forging treatment and machining to get the required size of tube target. Another method is to prepare tubular targets by cold isostatic pressing, sintering and extrusion processes.
Our company can produce and process molybdenum tube target, molybdenum sputtering target, molybdenum plate, molybdenum foil, molybdenum sheet and molybdenum processing workpiece according to the needs of customers.
