Preparation of high purity molybdenum target
(1) Molybdenum alloy with purity over 99.9% produced by sputtering method is used as raw material. Molybdenum alloy is put into the feeding device of electron beam cooling bed furnace, that is, spiral tube. The feeding device is installed in the feeding system of electron beam cooling bed furnace, and the feeding system and melting system of electron beam cooling bed furnace are emptied, the molybdenum blank with purity above 99.98% can be obtained;
(2) After removing the oxide skin on the surface of the bar, the "forging cap" at both ends is removed, and then the small column with diameter of φ 100x and length of 45mm required by CNC lathe is sawed and cut;
(3) The numerical control lathe is used to turn and polish the two sawn end faces of small column blocks, and any end face is taken as the bottom surface, and the bottom is turned and milled internally. The depth of the inner turning is 2mm, and the edge is reserved. The angle between the edge and the transition edge of the inner turning milling surface is 120 ° and the chamfering of the edge is 45 °. After the internal turning milling is completed, the reserved edge is chamfered, and the other end is opened (threaded);
(4) The cylindrical molybdenum sputtering target is obtained by cleaning the machined cylinder block.
